Structures and components thereof having a desired surface chara

Details Structures and components thereof having a desired surface chara Structures and components thereof having a desired surface chara

1999-05-07

2000-11-14

Beck, Shrive

Coating apparatus

Gas or vapor deposition

Running length work

118723HC, 118723FI, C23C 1600

Patent

active

061464627

ABSTRACT:
Methods and apparatus for plasma modifying a substrate are disclosed along with associated techniques for applying coatings to the substrate. Particular utility has been found using a hollow cathode to generate the plasma along with magnetic focusing means to focus the plasma at the surface of a substrate.

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