Structured silicon anode

Details Structured silicon anode Structured silicon anode

2008-03-04

2010-11-30

Smith, Bradley K (Department: 2894)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S800000, C438S900000, C257S002000, C257S003000, C257S004000, C257S005000, C257SE29002, C324S252000, C977S948000, C977S701000, C977S810000, C977S932000

Reexamination Certificate

active

07842535

ABSTRACT:
A silicon/lithium battery can be fabricated from a silicon substrate. This allows the battery to be produced as an integrated unit on a chip. The battery includes a silicon anode formed from submicron diameter pillars of silicon fabricated on an n-type silicon wafer. The battery also includes a cathode including lithium.

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