Structure to achieve high-Q and low insertion loss film bulk...

Details Structure to achieve high-Q and low insertion loss film bulk... Structure to achieve high-Q and low insertion loss film bulk...

2006-10-03

2006-10-03

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S324000, C310S365000, C333S187000

Reexamination Certificate

active

07116034

ABSTRACT:
A film bulk acoustic resonator is formed on a substrate. The film bulk acoustic resonator includes a layer of piezoelectric material having a first surface proximate the substrate, and a second surface distal from the substrate. The first conductive layer deposited on the first surface of the piezoelectric material includes a first portion having a surface on a different plane than a surface associated with a second portion.

REFERENCES:
patent: 5233259 (1993-08-01), Krishnaswamy et al.
patent: 5395641 (1995-03-01), Shibata et al.
patent: 5747857 (1998-05-01), Eda et al.
patent: 5884378 (1999-03-01), Dydyk
patent: 5935641 (1999-08-01), Beam et al.
patent: 6259187 (2001-07-01), Abe et al.
patent: 6349454 (2002-02-01), Manfra et al.
patent: 6456173 (2002-09-01), Ella et al.
patent: 6483229 (2002-11-01), Larson, III et al.
patent: 6566979 (2003-05-01), Larson, III et al.
patent: 6662419 (2003-12-01), Wang et al.
patent: 6779878 (2004-08-01), Higuchi et al.
patent: 6788170 (2004-09-01), Kaitila et al.
patent: 6816035 (2004-11-01), Ma et al.
patent: 6861783 (2005-03-01), Wang et al.
patent: 2003/0057806 (2003-03-01), Peczalski
patent: 2003/0067368 (2003-04-01), Ohara et al.
patent: 2003/0102773 (2003-06-01), Ylilammi et al.
patent: 2004/0021191 (2004-02-01), Bradley
patent: 2004/0021400 (2004-02-01), Bradley et al.
patent: 0771070 (1997-05-01), None
patent: 1073198 (2001-01-01), None
patent: 2000-263784 (2000-09-01), None
patent: WO-03028211 (2003-04-01), None
Krishnaswamy, S. V., “Film Bulk Acoustic Wave Resonator Technology”,Proceedings of the Ultrasonics Symposium,Honolulu, HI,(Dec. 4, 1990),529-536.

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