Structure of TFT electrode for preventing metal layer...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C257S072000, C439S046000, C439S047000, C439S147000

Reexamination Certificate

active

07045817

ABSTRACT:
The invention provides a TFT electrode structure and its manufacturing method that can prevent metal diffusion occurring in the fabrication of a TFT, and thereby reduce the risk of contamination of the chemical vapor deposition process due to metallic ion diffusion. The transparent pixel electrode is formed after the gate electrode metal so that the pixel transparent electrode can be used as a barrier layer to prevent metal diffusion under high temperature from the gate electrode metal to adjacent insulating layers or the active layer. Further, the method used to form the transparent pixel electrode is a low-temperature physical vapor deposition process, which affected less by the processing environment, and the transparent pixel electrode is a conductive layer that is not affected by metal diffusion.

REFERENCES:
patent: 5838037 (1998-11-01), Masutani et al.
patent: 6008869 (1999-12-01), Oana et al.
patent: 6218221 (2001-04-01), Sah
patent: 6674502 (2004-01-01), Terakado et al.
patent: 6791111 (2004-09-01), Yamazaki et al.
patent: 2003/0170926 (2003-09-01), Nakayama et al.
patent: 2004/0063374 (2004-04-01), So et al.
patent: 2004/0140566 (2004-07-01), Jeong et al.
patent: 2004/0223090 (2004-11-01), Takahashi et al.
patent: 2005/0082528 (2005-04-01), Kobayashi et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Structure of TFT electrode for preventing metal layer... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Structure of TFT electrode for preventing metal layer..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Structure of TFT electrode for preventing metal layer... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3574670

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.