Measuring and testing – Fluid pressure gauge – Electrical
Patent
1993-03-25
1994-09-20
Woodiel, Donald
Measuring and testing
Fluid pressure gauge
Electrical
73708, G01L 2112
Patent
active
053478690
ABSTRACT:
A new structure of a vacuum meter with good designs of temperature compensation and stabilization, The structure comprises a floating plate made by a micro-machining technique and a thermal sensitive element installed on the floating plate, The floating plate has a number of suspending arms extending outward to supporting the floating plate in a cavity of a semiconductor substrate for good heat isolation. The area of the floating plate and the length and width of the suspending arm has a specific ratio for an optimized sensitivity. A dummy resistor for temperature compensation is composed by a serial connection of a constant resistor with almost zero temperature coefficient and the thermal sensitive elements in a specific ratio. The vacuum meter further overlap on a temperature-controlled thermoelectric cooling device and is covered by a thermal shield so that the temperatures on and circumferential to the floating plate can be maintained stably.
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Carlos H. Mastrangelo et al., "Microfabricated Thermal Absolute-Pressure Sensor with On-Chip Digital Front-End Processor", IEEE Journal of Solid-State Circuits, 26:No. 12:1998-2007, Dec. 1991.
A. W. vanHerwaarden et al., "Double-Beam Integrated Thermal Vacuum Sensor", Journal of Vacuum Science Technology, 5:No. 4:2454-2457, Jul./Aug. 1987.
Shie Jin-Shown
Weng Ping-Kuo
Opto Tech Corporation
Woodiel Donald
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