Structure of a structure release and a method for...

Details Structure of a structure release and a method for... Structure of a structure release and a method for...

2005-03-22

2005-03-22

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S246000, C359S254000, C359S290000, C359S291000, C438S253000, C438S396000

Reexamination Certificate

active

06870654

ABSTRACT:
A structure of a structure release and a manufacturing method are provided. The structure and manufacturing method are adapted for an interference display cell. The structure of the interference display cell includes a first electrode, a second electrode and at least one supporter. The second electrode has at least one hole and is arranged about parallel with the first electrode. The supporter is located between the first electrode and the second electrode and a cavity is formed. In the release etch process of manufacturing the structure, an etchant can pass through the hole to etch a sacrificial layer between the first and the second electrodes to form the cavity; therefore, the time needed for the process becomes shorter.

REFERENCES:
patent: 5835255 (1998-11-01), Miles
patent: 6812480 (2004-11-01), Lee et al.
patent: 20030232203 (2003-12-01), Mutlu et al.

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