Structure for reducing stress between metallic layer and spin-on

Details Structure for reducing stress between metallic layer and spin-on Structure for reducing stress between metallic layer and spin-on

1998-02-09

1999-09-21

Speer, Timothy

Stock material or miscellaneous articles

Composite

Of quartz or glass

428432, 428469, 428472, B32B 1700

Patent

active

059552000

ABSTRACT:
A structure for reducing the stress between a HSQ dielectric layer and a metal layer. The structure comprises a metal layer, a stress buffer above the metal layer, and a spin-on-glass layer above the stress buffer. If the spin-on-glass layer is a dielectric material capable of producing tensile stress, the stress buffer layer is made from a material capable of generating compressive stress. On the contrary, if the spin-on-glass layer is a dielectric material capable of producing compressive stress, the stress buffer layer is made from a material capable of generating tensile stress.

REFERENCES:
patent: 5419988 (1995-05-01), Mohri

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