Structure for diagnosis system of reaction process

Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation

Reexamination Certificate

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Reexamination Certificate

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07830505

ABSTRACT:
The present invention relates to a spectroscopy analyzer for real-time diagnostics of process, and more particularly, to a spectroscopy analyzer for real-time diagnostics of process, in which a beam is injected to a reaction byproduct or a reactant and then an output beam is measured, thereby performing quantitative and qualitative analysis of the reaction byproduct or the reactant.

REFERENCES:
patent: 7598509 (2009-10-01), Ershov et al.
patent: 2006/0123884 (2006-06-01), Selker et al.
patent: 10-2006-0009668 (2006-02-01), None

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