Structure for coupling probes of probe device to...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C324S761010, C324S762010

Reexamination Certificate

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07456640

ABSTRACT:
An apparatus for testing integrated circuit devices includes a probe device having a plurality of probes, a first substrate including a product substrate having a first surface and an array of electrical contacts disposed on the first surface thereof, and a second substrate disposed between the probes and the first substrate for electrically coupling the probes to corresponding electrical contacts disposed on the first surface of the product substrate.

REFERENCES:
patent: 5534784 (1996-07-01), Lum et al.
patent: 5828226 (1998-10-01), Higgins et al.
patent: 6215321 (2001-04-01), Nakata
patent: 6917102 (2005-07-01), Zhou et al.

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