Structure for alignment of an ion source aperture with a predete

Details Structure for alignment of an ion source aperture with a predete Structure for alignment of an ion source aperture with a predete

1994-06-29

1995-05-30

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250423R, 250396R, H01J 3700

Patent

active

054204151

ABSTRACT:
A structure and method of accurately positioning and aligning an extraction member aperture (arc slit) and an extraction electrode gap with a predetermined beam line in an ion implantation apparatus is disclosed. The extraction member aperture is positioned with respect the ion beam source housing thereby eliminating cumulative tolerance errors which plague prior art ion implantation apparatuses. A removable alignment fixture is used in conjunction with a self-centering clamping assembly to accurately position the extraction member aperture in alignment with the predetermined beam line. The extraction member is secured to a support ring of the clamping assembly and the clamping assembly is mounted to the alignment fixture. The alignment fixture is mounted to the source housing precisely aligning the extraction member aperture with the predetermined beam line. The split ring of the clamping assembly is secured to a support tube surrounding the ion generating arc chamber. Since the clamping assembly is self centering, the alignment of the extraction member aperture is not compromised. The alignment fixture is then removed. After removal of the alignment fixture, a variable gap extraction electrode assembly is secured to the source housing. A machining fixture is used during fabrication and assembly of the extraction electrode assembly to insure that the electrode gap is aligned with the predetermined beam line when the extraction electrode assembly is mounted to the source housing.

REFERENCES:
patent: 3723785 (1973-03-01), Nixon et al.
patent: 4580058 (1986-04-01), Mears et al.
patent: 4714834 (1987-12-01), Shubaly
patent: 4847504 (1989-07-01), Aitken
patent: 4883968 (1989-11-01), Hipple et al.
patent: 4985634 (1991-01-01), Seengl et al.
patent: 5300785 (1994-04-01), Aitken

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