Structure comprising an adiabatic coupler for adiabatic...

Details Structure comprising an adiabatic coupler for adiabatic... Structure comprising an adiabatic coupler for adiabatic...

2004-05-18

2008-12-23

Wong, Tina M (Department: 2874)

Optical waveguides

With optical coupler

Particular coupling structure

C385S028000, C385S043000, C385S049000, C385S130000

Reexamination Certificate

active

07469084

ABSTRACT:
A structure comprises an inner strip waveguide (1) and an outer rib waveguide (2) on a common substrate. The thicker inner waveguide (1) is patterned into an inner core layer (3). The thinner outer waveguide (2) is patterned into an outer core layer (4). The inner and outer waveguides are separated by a gap (5) being less than 500 nm. The structure forms an adiabatic coupler. In the method, the first (inner) waveguide (1) is patterned into the thicker inner core layer (3) by etching trenches (8). A thinner outer silicon layer (4) is attached on top of the inner-core layer (3) and the first waveguide (1) to form an outer core layer (4). The second (outer) waveguide (2) is patterned into the outer core layer (4).

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