Structure and process for testing integrated circuits permitting

Details Structure and process for testing integrated circuits permitting Structure and process for testing integrated circuits permitting

1988-07-07

1990-03-06

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158D, G01R 1908, G01R 3128

Patent

active

049069217

ABSTRACT:
The instant invention relates to a test structure for an integrated circuit for determining the incidence of various conduction effects on given layers and separating the surface effects from the wedge effects and the periphery effects into two perpendicular directions, wherein test patterns of determined shapes are incorporated into elementary components comprising the given layers transversely polarized, further comprising at least four test patterns (11, 13, 15, 17) in which the given layers are delimited according to four rectangles, each of which has a common dimension with another one, that is, those four rectangles have only two length values (YD) and two width values (XD).

REFERENCES:
patent: 3974443 (1976-08-01), Thomas
patent: 4467400 (1984-08-01), Stopper
patent: 4479088 (1984-10-01), Stopper
patent: 4486705 (1985-12-01), Stopper
patent: 4672314 (1987-06-01), Kokkas
Baker et al, IBM Technical Disclosure Bulletin, vol. 14, No. 12, p. 3707, May 1972.

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