Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2006-05-31
2010-02-23
Chowdhury, Tarifur R. (Department: 2886)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
Reexamination Certificate
active
07667842
ABSTRACT:
The present invention provides a technique for obtaining overlay error and PPE error information from a single measurement structure. This is accomplished by forming periodic sub-structures in at least two different device layers in a single measurement structure, wherein at least one segmented and one non-segmented portion is provided in the two different device layers.
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International Search Report Dated Jan. 25, 2007.
Akanbi Isiaka O
Chowdhury Tarifur R.
GlobalFoundries Inc.
Williams Morgan & Amerson P.C.
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