Structure and method for remotely measuring process data

Details Structure and method for remotely measuring process data Structure and method for remotely measuring process data

1993-09-20

1995-11-14

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

374120, 374184, H01L 2166

Patent

active

054666147

ABSTRACT:
A method and structure for sensing data such as temperature with respect to objects such as silicon wafers undergoing fabrication or other processes involve the use of a monitor element of material and configuration similar to that of the objects being processed. A structure such as a closed loop or segment of a spiral may be formed on the surface of the monitor element, and acts as a secondary coil when brought into operative relation with a transformer structure which includes a primary coil, a current source and a sensing device. The sensing device senses variations in the electrical characteristics in the primary coil, caused by the presence of the monitor element, and can thereby determine the temperature or other desired data relating to the monitor element, which is substantially the same as comparable data for the objects being processed.

REFERENCES:
patent: 2989691 (1961-06-01), Cook
patent: 3234461 (1966-02-01), Trent et al.
patent: 3338100 (1967-08-01), Takami
patent: 3391576 (1968-07-01), Takami et al.
patent: 3544893 (1970-12-01), Savin et al.
patent: 3781506 (1973-12-01), Ketchum et al.
patent: 4000458 (1976-12-01), Miller et al.
patent: 4095469 (1978-06-01), Yamada et al.
patent: 4924073 (1990-05-01), Chiba
patent: 5030908 (1991-07-01), Miyoshi et al.
Machine Design, vol. 60, No. 11, May 19, 1988, Cleveland US; pp. 149-173; Anonymous "Sensors and Transducers".

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