Structure and method for reducing thermal stresses on a...

Optical: systems and elements – Optical modulator – Having particular chemical composition or structure

Reexamination Certificate

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Reexamination Certificate

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11232604

ABSTRACT:
Method and structure for mounting a torsional hinged device, such as a mirror, having a first TCE (thermal coefficient of expansion) on a substrate having a second TCE different than said first TCE. The structure comprising a plurality of compliant support posts between the substrate and the torsional hinged device that deform when the contraction and/or expansion of the torsional hinged device is different than the corresponding contraction and expansion of the substrate.

REFERENCES:
patent: 6563106 (2003-05-01), Bowers et al.
patent: 6885493 (2005-04-01), Ljungblad et al.
patent: 6894823 (2005-05-01), Taylor et al.
patent: 6964196 (2005-11-01), Turner et al.
patent: 7034982 (2006-04-01), Doan
patent: 7092143 (2006-08-01), Heureux

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