Structure and method for determining isolation of integrated cir

Details Structure and method for determining isolation of integrated cir Structure and method for determining isolation of integrated cir

1991-10-29

1993-10-19

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324719, G01R 3102

Patent

active

052549410

ABSTRACT:
A wafer substrate test structure and method provides a novel means for quantitatively determining electrical isolation between active devices and passive elements in a monolithic integrated circuit. The structure and method of this invention are useful for both optimal design and manufacture of integrated circuit devices.

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