Structure and method for collar self-aligned to buried plate

Details Structure and method for collar self-aligned to buried plate Structure and method for collar self-aligned to buried plate

2007-05-29

2007-05-29

Deo, Duy-Vu N (Department: 1765)

Semiconductor device manufacturing: process

Making passive device

Trench capacitor

C438S389000, C438S391000, C438S393000, C438S394000, C438S395000

Reexamination Certificate

active

10710061

ABSTRACT:
A structure and method are provided for forming a collar surrounding a portion of a trench in a semiconductor substrate, the collar having a lower edge self-aligned to a top edge of a buried plate disposed adjacent to a lower portion of the trench.

REFERENCES:
patent: 5871811 (1999-02-01), Wang et al.
patent: 6001684 (1999-12-01), Shen
patent: 6057216 (2000-05-01), Economikos et al.
patent: 6218319 (2001-04-01), Dutron et al.
patent: 6271141 (2001-08-01), Juengling et al.
patent: 6271142 (2001-08-01), Gruening et al.
patent: 6316310 (2001-11-01), Wensley et al.
patent: 6365485 (2002-04-01), Shiao et al.
patent: 6541334 (2003-04-01), Luetzen et al.
patent: 6544856 (2003-04-01), Morhard et al.
patent: 6599798 (2003-07-01), Tews et al.
patent: 6638815 (2003-10-01), Bronner et al.
patent: 6979613 (2005-12-01), Wu et al.
patent: 2004/0048441 (2004-03-01), Akatsu et al.

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