Structure and method for buried inductors for ultra-high...

Details Structure and method for buried inductors for ultra-high... Structure and method for buried inductors for ultra-high...

2008-05-19

2010-11-30

Landau, Matthew C (Department: 2813)

Semiconductor device manufacturing: process

Making passive device

Resistor

C257SE21022, C257S531000

Reexamination Certificate

active

07842580

ABSTRACT:
A design structure is embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes a high resistivity substrate and a buried inductor formed directly in the high resistivity substrate and devoid of an insulating layer therebetween.

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