Structure and method for a microelectromechanic cylindrical...

Details Structure and method for a microelectromechanic cylindrical... Structure and method for a microelectromechanic cylindrical...

2006-09-12

2006-09-12

Evans, F. L. (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

Reexamination Certificate

active

07106441

ABSTRACT:
A tunable microelectromechanical (MEMS) spectrophotometer with a rotating cylindrical reflective diffraction grating is integrated with a photodetector and an optical fiber light source on a Rowland circle on a monolithic silicon substrate.

REFERENCES:
patent: 6249346 (2001-06-01), Chen et al.
patent: 6295130 (2001-09-01), Sun et al.
Kiang, Meng-Hsiung, Solgaard, Olav, Muller, Richard, Lau, Kam: Micromachined Polysilicon Microscanners for Barcode Readers, IEEE Photonics Technology Letters, Dec. 1996, pp. 1707-1709, vol. 8, No. 12.
Born, Max, Wolf, Emil: Electromagnetic Theory of Propagation, Interference and Diffraction of Light, Principles of Optics, Pergamon Press, 1975, Fifth Edition pp. 412-414.

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