Structure and fabrication of SiCr microfuses

Details Structure and fabrication of SiCr microfuses Structure and fabrication of SiCr microfuses

1993-11-09

1994-08-23

Thomas, Tom

Fishing, trapping, and vermin destroying

148DIG55, H01L 21465

Patent

active

053407750

ABSTRACT:
A SiCr microfuse, deletable either by electrical voltage pulses or by laser pulses, for rerouting the various components in an integrated circuit, as where redundancy in array structures is implemented, and the method of fabricating same, at any wiring level of the chip, by utilizing a direct resist masking of the SiCr fuse layer to eliminate problems of mask damage and residual metal adjacent the fuse.

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patent: 5069748 (1991-12-01), Przybysz

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