Stroboscopic type potential measurement device

Details Stroboscopic type potential measurement device Stroboscopic type potential measurement device

1987-01-29

1988-09-27

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

G01R 3126

Patent

active

047744600

ABSTRACT:
A stroboscopic type potential measurement device by which a sample is irradiated with a pulsed charged particle beam in synchronism with a periodical voltage in the sample and secondary electrons emitted by the sample irradiated with the pulsed charged particle beam are detected, while varying the phase of the pulsed charged particle beam with respect to that of the periodical voltage in the sample. At least one phase scanning cycle, forward and backward, is effected, by which the phase of the pulsed charged particle beam with respect to that of the periodical voltage is increased from 0.degree. to 360.degree. at a predetermined rate and thereafter descreased from 360.degree. to 0.degree. at substantially the same rate as the predeterming rate of increase. Outputs at each of the phases are subjected to an average processing so as to obtain one measurement result.

REFERENCES:
patent: 4220854 (1980-09-01), Feuerbaum
patent: 4223220 (1980-09-01), Feuerbaum
patent: 4477775 (1984-10-01), Fazekas
patent: 4623836 (1986-11-01), Frosien et al.
Scanning Electron Microscopy/1983/II, Todokoro, H., et al. "Stroboscopic Scanning Electron Microscope . . . ", pp. 561-568.
IEEE Jour. of Solid-State Ckts., Feuerbaum, H., et al., "Quantitative Measurement . . . ", vol. SC--13, No. 3, Jun. 1987, pp. 319-325.

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