Radiation imagery chemistry: process – composition – or product th – Stripping process or element
Reexamination Certificate
2005-04-12
2005-04-12
Le, Hoa Van (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Stripping process or element
C430S257000, C430S258000, C430S259000, C430S260000, C430S263000, C430S331000
Reexamination Certificate
active
06878500
ABSTRACT:
Compositions and methods for the removal of patterned photodefinable materials, such as photoresists and/or photoimageable dielectric materials, from substrates are provided. Such compositions and methods are useful in the manufacture of electronic devices. Methods of reworking electronic device substrates by removing patterned photodefinable material from an underlying organic film are also provided.
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Orr Edward C.
Rutter, Jr. Edward W.
Tran Cuong Manh
Cairns S. Matthew
Le Hoa Van
Marlborough,
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