Stripping liquor composition for removing photoresists comprisin

Details Stripping liquor composition for removing photoresists comprisin Stripping liquor composition for removing photoresists comprisin

1977-08-15

1979-09-25

Pitlick, Harris A.

Compositions

Compositions containing a single chemical reactant or plural...

Organic reactant

252100, 134 3, 134 38, 134 41, 134 42, C23G 502, B08B 308, C11D 738

Patent

active

041690680

ABSTRACT:
A stripping liquor composition consisting essentially of (A) at least one compound selected from among sulfonic acids, acid esters of sulfuric acid, and acid esters of phosphoric acid, (B) hydrogen peroxide, and (C) at least one of organic solvents, with or without the addition of (D) at least one of polyhydric alcohols.

REFERENCES:
patent: 3075923 (1963-01-01), Berst et al.
patent: 3582401 (1971-06-01), Berilla et al.
patent: 3629004 (1971-12-01), Cooper et al.
patent: 3801512 (1974-04-01), Solenberger
patent: 3871929 (1975-03-01), Schevey et al.
patent: 3900337 (1975-08-01), Beck et al.
patent: 3905907 (1975-09-01), Shiga
patent: 3988256 (1976-10-01), Vandermey et al.
patent: 4051057 (1977-09-01), Ericson et al.
patent: 4070203 (1978-01-01), Neisius et al.

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