Compositions – Fluent dielectric – N-containing
Patent
1995-04-28
1996-01-02
Hollrah, Glennon H.
Compositions
Fluent dielectric
N-containing
252545, 252548, 134 38, 430329, C11D 140, C11D 170, C11D 1755, G03C 530
Patent
active
054805856
ABSTRACT:
A photoresist stripping liquid composition comprising an alkanol amine compound, a sulfone compound or sulfoxide compound, and a hydroxy compound. The composition is excellent in its photoresist stripping performance, safety and working efficiency, and does not cause corrosion on a substrate possessing a metal film.
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patent: 5124233 (1992-06-01), Meier et al.
patent: 5268260 (1993-12-01), Bantu et al.
Horiuchi Yoshiaki
Shiotsu Shinichiro
Hollrah Glennon H.
Lambkin Deborah
Nagase Electronic Chemicals, Ltd.
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