Stripping compositions and methods of stripping resists

Details Stripping compositions and methods of stripping resists Stripping compositions and methods of stripping resists

1982-08-17

1984-01-31

Willis, Jr., P. E.

Compositions

Fluent dielectric

N-containing

134 38, 252153, 252170, 252DIG8, 252171, C11D 750, C11D 732

Patent

active

044288719

ABSTRACT:
Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and a diethylene glycol monoalkyl ether compound. Polyethylene glycol may be added to provide even more effective stripping compositions.

REFERENCES:
patent: 3551204 (1970-12-01), Bolger et al.
patent: 3673099 (1972-06-01), Corby et al.
patent: 3796602 (1974-03-01), Briney et al.
patent: 3813309 (1974-05-01), Bakos et al.
patent: 4055515 (1977-10-01), Kirch
patent: 4276186 (1981-06-01), Bakos et al.

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