Radiation imagery chemistry: process – composition – or product th – Stripping process or element
Patent
1985-04-11
1986-10-14
Albrecht, Dennis L.
Radiation imagery chemistry: process, composition, or product th
Stripping process or element
134 38, 252153, 252162, 252170, 252542, 252544, 252548, 252549, 430258, 430331, C11D 732, C11D 752, C23D 1700, G03C 1700
Patent
active
046172513
ABSTRACT:
Disclosed is a stripping composition for effectively removing an organic polymeric material from a substrate. The stripping composition is essentially free of phenol compounds and halogenated hydrocarbon compounds and contains a select amine compound and an organic polar solvent. It has been found that the stripping composition is highly effective, even when the organic polymeric material to be removed from a substrate is a positive resist which has been subjected to high temperature post-baking operations.
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Albrecht Dennis L.
O'Day Thomas P.
Olin Hunt Specialty Products Inc.
Simons William A.
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