Stress tuned blazed grating light valve

Optical: systems and elements – Diffraction – From grating

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C359S291000, C359S566000, C359S573000

Reexamination Certificate

active

06639722

ABSTRACT:

FIELD OF THE INVENTION
This invention relates to the field of light modulators. More particularly, this invention relates to the field of light modulators where an incident light is modulated to produce a blazed diffraction.
BACKGROUND OF THE INVENTION
Bloom et al. in U.S. Pat. No. 5,311,360, entitled “Method and apparatus for modulating a light beam,” teach a grating light valve which operates in a reflection mode and a diffraction mode. The grating light valve includes elongated elements suspended above a substrate. In the reflective mode, reflective surfaces of the grating light valve cause incident light to constructively combine to form reflected light. In the diffractive mode, the reflective surfaces of the grating light valve are separated by a quarter wavelength of the incident light to produce diffracted light. When the grating light valve is in the diffractive mode, the grating light valve predominantly diffracts light into a plus one diffraction order and a minus one diffraction order but also diffracts a small amount of light into higher diffraction orders.
Bloom et al. further teach an alternative grating light valve which operates in the reflection mode and in a blazed diffraction mode. The alternative grating light valve includes the elongated elements suspended above the substrate. For the alternative grating light valve, the elongated elements include off-axis neck portions at ends of each of the elongated elements. In the reflection mode, the elongated elements are parallel causing incident light to reflect from the elongated elements and, thus, produce the reflected light. In the blazed diffraction mode, each of the elongated elements is rotated about an axis defined by the off-axis neck portions to produce a blazed diffraction.
Because the light modulator is switched between the reflection mode and the blazed diffraction mode and because the reflection mode diffracts small quantities of light into the same angles as does the blazed diffraction mode, a contrast between the nonactivated state and the activated state is less than an optimum contrast. Further, the off-axis neck portions are critical to operation of the light modulator which necessitate tight tolerances for the off-axis neck portions making the light modulator relatively difficult to fabricate and also relatively expensive to fabricate.
What is needed is a blazed diffractive light modulator which provides higher contrast.
What is needed is a blazed diffractive light modulator which is easier to fabricate.
What is needed is a blazed diffractive light modulator which is more economical to fabricate.
SUMMARY OF THE INVENTION
The present invention is a light modulator. The light modulator includes elongated elements arranged parallel to each other and suspended above a substrate. The light modulator operates in a first diffraction mode and in a second diffraction mode. In the first diffraction mode, an incident light diffracts into at least two diffraction orders. In the second diffraction mode, the incident light diffracts into a single diffraction order, which is at a diffraction angle different from diffraction angles for the at least two diffraction orders.
Each of the elongated elements comprises a central blazed portion, a first outer blaze transition, and a second outer blaze transition. The central blaze portion couples the first outer blaze transition to the second outer blaze transition. Each of the central blazed portions comprises a reflective surface. Selected ones of the central blazed portions comprise a first conductive element. The first outer blaze transition and the second outer blaze transition are coupled to the substrate. The substrate comprises a second conductive element.
The elongated elements produce the first diffraction when a first electrical bias, preferably a zero electrical bias, is applied between the first conductive elements of the selected ones of the elongated elements and the second conductive element. A relative height of the blazed portions are adjusted to produce the second diffraction when a second electrical bias is applied between the first conductive elements of the selected ones of the elongated elements and the second conductive element.


REFERENCES:
patent: 3886310 (1975-05-01), Guldberg et al.
patent: 4566935 (1986-01-01), Hornbeck
patent: 4571603 (1986-02-01), Hornbeck et al.
patent: 4710732 (1987-12-01), Hornbeck
patent: 5182665 (1993-01-01), O'Callaghan et al.
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5459610 (1995-10-01), Bloom et al.
patent: 5485304 (1996-01-01), Kaeriyama
patent: 5629801 (1997-05-01), Staker et al.
patent: 5661592 (1997-08-01), Bornstein et al.
patent: 5691836 (1997-11-01), Clark
patent: 5757536 (1998-05-01), Ricco et al.
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5841579 (1998-11-01), Bloom et al.
patent: 5847859 (1998-12-01), Murata
patent: 5926309 (1999-07-01), Little
patent: 5949570 (1999-09-01), Shiono et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 5986796 (1999-11-01), Miles
patent: 5999319 (1999-12-01), Castracane
patent: 6061166 (2000-05-01), Furlani et al.
patent: 6071652 (2000-06-01), Feldman et al.
patent: 6169624 (2001-01-01), Godil et al.
patent: 6172796 (2001-01-01), Kowarz et al.
patent: 6181458 (2001-01-01), Brazas, Jr. et al.
patent: 6188519 (2001-02-01), Johnson
patent: 6195196 (2001-02-01), Kimura et al.
patent: 6215579 (2001-04-01), Bloom et al.
patent: 6219015 (2001-04-01), Bloom et al.
patent: 6229650 (2001-05-01), Reznichenko et al.
patent: 6252697 (2001-06-01), Hawkins et al.
patent: 6268952 (2001-07-01), Godil et al.
patent: 6396789 (2002-05-01), Guerra et al.
patent: 6445502 (2002-09-01), Islam et al.
patent: 2002/0015230 (2002-02-01), Pilossof et al.
patent: 2002/0021485 (2002-02-01), Pilossof
patent: 2002/0079432 (2002-06-01), Lee et al.
patent: 2002/0105725 (2002-08-01), Sweatt et al.
patent: WO 96/08031 (1996-03-01), None
patent: WO 99/67671 (1999-12-01), None
Apte et al., “Deformable Grating Light Valves for High Resolution Displays,” Solid State Actuator Workshop, Hilton Head, South Carolina, Jun. 13-16, 1994.
Sene et al., “Polysilicon micromechanical gratings for optical modulation,” Sensors and Actuators, vol. A57, pp. 145-151, 1996.
Amm et al., “Invited Paper: Grating Light Valve™ Technology: Update and Novel Applications,” SID Digest, vol. 29, 1998.
“Micromachined Opto/Electro/Mechanical Systems,” Electronic Systems, NASA Tech Briefs, Mar. 1997, pp. 50 & 52.
David M. Burns et al., “Development of Microelectromechanical Variable Blaze Gratings,” Sensors and Actuators A 64 (1998), pp. 7-15.
“Development of Digital MEMS-Based Display Technology Promises Improved Resolution, Contrast, And Speed”, XP-000730009, 1997, p. 33.
Solgaard, O.,Integrated semiconductor light modulators for fiber-optic and display applications, Ph.D. Dissertation, Stanford University, Feb. 1992.
Apte, R.B.,Grating light valves for high resolution displays, Ph.D. Dissertation, Stanford University, Jun. 1994.
Burns, D.M. et al.,Development of microelectromechanical variable blaze gratings, Sensors and Actuators A, pp. 7-15, 1998.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Stress tuned blazed grating light valve does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stress tuned blazed grating light valve, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stress tuned blazed grating light valve will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3118227

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.