Electricity: measuring and testing – Magnetic – Stress in material measurement
Patent
1994-03-30
1996-03-26
Snow, Walter E.
Electricity: measuring and testing
Magnetic
Stress in material measurement
73779, G01B 724, G01R 3318
Patent
active
055023819
ABSTRACT:
A compact and solid-state mechanical sensor comprises a magnetic layer having magnetostriction and a planar coil for detecting a mechanical property as a change in impedance. The sensitivity of the sensor is improved with heat treatment to relax the internal stress in the magnetic layer. The magnetic layer 12a of 5 .mu.m of thickness is formed on a titanium substrate 11 of 9.4 ppm/.degree.C. thermal expansion coefficient. The magnetic layer comprises an Fe-based amorphous alloy film prepared with a sputtering method, and it has a composition of Fe 74, Cr 4, Si 13 and B 9 (at %), +22 ppm of saturation magnetostriction constant and 8.0 ppm/.degree.C. of thermal expansion coefficient. An insulator layer 13a made of SiO.sub.x of 2 .mu.m of thickness on the magnetic layer 12a, and a planar coil 14 and input/output terminals 15a, 15b made of aluminum of 2 .mu.m of thickness is formed on the insulator layer 13a. The planar coil 14 is made of a linear conducting line having a form wherein a spiral coil is folded as a rectangular shape by 90.degree..
REFERENCES:
patent: 4785671 (1988-11-01), Wakamiya et al.
Hiroyuki Hase et al. "Oil Pressure Sensor Using Amorphous Magnetic Alloy," SAE Technical Paper Series, No. 920700 (1992).
Matsushita Electric - Industrial Co., Ltd.
Snow Walter E.
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