Stress sensor apparatus

Details Stress sensor apparatus Stress sensor apparatus

1976-09-20

1978-11-14

Albritton, C. L.

Electrical resistors

Strain gauge type

Fluid- or gas pressure-actuated

73777, 357 26, G01L 122

Patent

active

041258207

ABSTRACT:
Semiconductor material stress sensors are provided where the sensing resistors therein have good electrical stability while being sufficiently protected without degrading sensor performance. This is accomplished through control of the locations of the maximum concentrations of the resistor dopant. The mounting of semiconductor stress sensors on mounts of a different material type in a manner minimizing offset temperature shifts is disclosed.

REFERENCES:
patent: 3417361 (1968-12-01), Heller
patent: 3513430 (1970-05-01), Heller
patent: 3739315 (1973-06-01), Kurtz et al.
patent: 3838379 (1974-09-01), Gieles et al.
patent: 3873956 (1975-03-01), Kurtz et al.

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