Stress sensor apparatus

Details Stress sensor apparatus Stress sensor apparatus

1976-09-29

1977-07-12

James, Andrew J.

Electrical resistors

Incased, embedded, or housed

Element in insulation with outer metallic sheath

357 91, 338 42, 29580, 148 15, 73 885SD, H01L 2984, H01L 2996, B01J 1700, H01L 500

Patent

active

040358232

ABSTRACT:
Semiconductor material stress sensors are provided where the sensing resistors therein have good electrical stability while being sufficiently protected without degrading sensor performance. This is accomplished through control of the locations of the maximum concentrations of the resistor dopant.

REFERENCES:
patent: 3730787 (1973-05-01), Murphy et al.
patent: 3796929 (1974-03-01), Nicholas et al.
patent: 3891468 (1975-06-01), Ito et al.
patent: 3893228 (1975-07-01), George et al.
patent: 3899695 (1975-08-01), Solomon et al.
patent: 3918996 (1975-11-01), Morgan
patent: 3941629 (1976-03-01), Jaffe
patent: 3968466 (1976-07-01), Nakamura
patent: 3994009 (1976-11-01), Hartlaub

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