Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1981-02-04
1983-08-23
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Diaphragm
73721, 73DIG4, 338 4, 338 42, G01L 906
Patent
active
043997074
ABSTRACT:
A stress sensitive semiconductor die and housing means therefore comprising a ceramic base member having a recessed portion and a shoulder portion around the periphery. A washer-like support member is positioned within the recess, one face of which is bonded to the base member, said support member having a central aperture. A stress sensitive semiconductor die is bonded to the other face of the support member with the center of the die being in substantial register with the aperture in the support member. Finally, cover means are attached to the shoulder portion.
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Buckingham S. W.
Honeywell Inc.
Jensen R. W.
Woodiel Donald O.
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