Stress sensitive humidity sensor based on a MEMS structure

Details Stress sensitive humidity sensor based on a MEMS structure Stress sensitive humidity sensor based on a MEMS structure

2005-09-30

2008-05-20

Kwok, Helen C. (Department: 2856)

Measuring and testing

Gas analysis

Moisture content or vapor pressure

C073S335020, C073S029010

Reexamination Certificate

active

07373819

ABSTRACT:
A humidity sensing apparatus and method include a substrate and a MEMS structure, wherein the MEMS structure is supported by the substrate. The MEMS structure comprises a humidity-sensitive material in association with a movable member such that when the humidity-sensitive material changes with humidity, the MEMS structure moves the movable member, thereby providing an indication of humidity based on a stress within the MEMS structure.

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