Stress relieved flat frame for DMD window

Details Stress relieved flat frame for DMD window Stress relieved flat frame for DMD window

2008-07-22

2008-07-22

Thai, Luan (Department: 2891)

Semiconductor device manufacturing: process

Packaging or treatment of packaged semiconductor

C438S124000, C438S027000, C257SE23118, C257SE23124

Reexamination Certificate

active

11118854

ABSTRACT:
An improved window frame and window piece for a micromirror assembly is disclosed herein. The window frame includes a stress-relieving contour positioned in the middle of the frame that can absorb the mechanical stresses applied to the window frame from the ceramic base and from the window piece. The window frame may be comprised of a single piece of sheet metal that has been stamped to include a stress-relieving contour. The stress-relieving contour may be comprised of a variety of shapes, including a “U” shape, an inverted “U” shape, a curved step shape, or other combinations thereof.

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