Stress isolated pressure sensing die, sensor assembly...

Measuring and testing – Fluid pressure gauge – Diaphragm

Reexamination Certificate

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Reexamination Certificate

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07661318

ABSTRACT:
The invention concerns a pressure sensing die to be mounted on a base, comprising:a diaphragm structure with a deflectable pressure sensing diaphragm whose deflection is representative of the pressure and sensing elements for detecting the deflection of the sensing diaphragm;a pedestal supporting the diaphragm structure;wherein the pedestal is a composite pedestal comprising top and bottom platforms connected by at least one small link having a mean cross-section smaller than the cross-section of the top platform, said small link isolating at least some of the stresses, produced by the mounting of the pressure sensing die on the base, from said deflectable pressure sensing diaphragm.

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patent: 4930929 (1990-06-01), Maglic
patent: 5926692 (1999-07-01), Kurtz
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patent: 6093579 (2000-07-01), Sathe
patent: 6528340 (2003-03-01), Haji-Sheikh et al.
patent: 6822318 (2004-11-01), Honer et al.
patent: 19714703 (1997-10-01), None
patent: 10349540 (2005-05-01), None
patent: WO-01/69194 (2001-09-01), None

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