Stress-free mount for imaging mask

Details Stress-free mount for imaging mask Stress-free mount for imaging mask

1994-11-22

1996-07-16

Ryan, Patrick

Stock material or miscellaneous articles

Structurally defined web or sheet

Edge feature

279 3, 269 21, 428195, B32B 900

Patent

active

055365590

ABSTRACT:
An imaging mount and apparatus that reduces or eliminates stress induced in an imaging mask mounted thereto. The mount comprises a support block and a trio of mounting pads connected thereto. At least two of the mounting pads are connected to the support block so that their respective positions are adjustable within a predetermined plane which is preferably substantially parallel to a surface of a substrate to be imaged. Each of the mounting pads including means for securing the imaging mask generally parallel to the predetermined plane. The positions the adjustable mounting pads adjust within the predetermined plane responsive to securing of the lithography mask thereto so that the imaging mask is essentially undeflected due to the securing thereof. The absence of deformation (and, as a result, stress) in the imaging mask due to its being secured to the mount reduces the degree of distortion of radiation passing through the mask and to the imprinted surface.

REFERENCES:
patent: 3158381 (1964-11-01), Yamamura
patent: 3943778 (1976-03-01), Wyse
patent: 4006909 (1977-02-01), Ollendorf
patent: 4088312 (1978-05-01), Frosch
patent: 4357006 (1982-11-01), Hayes
patent: 4497465 (1985-02-01), Yeakley
patent: 4506184 (1985-03-01), Siddall
patent: 4747608 (1988-05-01), Sato
patent: 4893403 (1990-01-01), Heflinger
Paros et al., How to design Flexure Hinges, Machine Design, pp. 151-156, Nov. 25, 1965.
Scire et al., Piezodriven 50.mu.m range stage with subnanometer resolution, Rev. Sci. Instrum. 49(12), pp. 1735-1740, Dec. 1976.
Wallace et al. A novel aligner for X-ray lithography, Nuclear Instruments and Methods in Physics Research, A319, pp. 371-375, 1992.
Drawing entitled "IBM Mask".
Drawing entitled "Example of Sperry Mask Mount One of Three Vacuum Holding Cups".

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