Strengthening a silicon micromachined mass air flow sensor in th

Details Strengthening a silicon micromachined mass air flow sensor in th Strengthening a silicon micromachined mass air flow sensor in th

1990-07-25

1991-10-15

Raevis, Robert

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

050563629

ABSTRACT:
A matrix consisting of glass microspheres and cured epoxy is disposed in a cavity at the backside of the silicon diaphragm to strengthen the diaphragm without any significant adverse influence on the ability of the sensor to quickly and accurately respond to changes in mass air flow. The strenthening which is imparted to the device enables it to comply with certain specifications defining the extent to which the device must be capable of withstanding damage from air-entrained dust particles acting on the frontside of the diaphragm.

REFERENCES:
patent: 3931736 (1976-01-01), Olmstead
patent: 4624137 (1986-11-01), Johnson et al.

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