Coating apparatus – Work holders – or handling devices
Patent
1997-06-25
1999-01-26
Bueker, Richard
Coating apparatus
Work holders, or handling devices
118728, C23C 1600
Patent
active
058633340
ABSTRACT:
A strength-enhanced quartz boat is provided to enhance the strength at connections between the quartz plates and quartz rods of the quartz boat. The strength-enhanced quartz boat includes a front quartz plate, a rear quartz plate, a first pair of quartz rods, a second pair of quartz rods and four reinforcement bars. The first pair of quartz rods are disposed longitudinally to connect the front quartz plate and rear quartz plate at an upper location respectively. The second pair of quartz rods are disposed longitudinally to connect, via first engagement connections, the front quartz plate and rear quartz plate at a lower location respectively. Each reinforcement bar is disposed longitudinally to connect, via a second engagement connection, to one corresponding front quartz plate or rear quartz plate at a location below one corresponding rod of the lower pair of quartz rods. A welding operation is performed on the first engagement connections and the second engagement connections respectively. The welding operation is further performed on a junction between each reinforcement bar and one corresponding rod of the second pair of quartz rods.
Cheng Nai-Yuan
Chou Chu-An
Lee Ching-Shou
Bueker Richard
Winbond Electronics Corp.
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