Strain sensor including an amorphous magnetic metal member, and

Details Strain sensor including an amorphous magnetic metal member, and Strain sensor including an amorphous magnetic metal member, and

1991-06-07

1993-03-16

Snow, Walter E.

Electricity: measuring and testing

Magnetic

Stress in material measurement

23779, 296211, G01B 724, G01L 112, H01C 1728

Patent

active

051948060

ABSTRACT:
A strain sensor is formed by integrally stacking the following elements an amorphous magnetic metal layer (amorphous layer) having a reverse magnetostriction effect, two print sheets which are bonded to the upper and lower surfaces of the amorphous magnetic metal layer through insulating layers to form one coil, and an insulating layer arranged on a surface of the coil. This strain sensor is produced in the following steps the step of forming a first conducting pattern by arranging a plurality of first conductors on a first insulating layer to be substantially parallel to each other, the step of forming a second insulating layer on the first conducting pattern, the step of forming an amorphous magnetic metal layer having a reverse magnetostriction effect on the second insulating layer to cross the first conductors constituting the first conducting pattern, the step of forming a third insulating layer on the amorphous magnetic metal layer, the step of forming a second conducting pattern constituted by a plurality of second conductors on the third insulating layer to cross the amorphous magnetic metal layer and to connect the first conductors constituting the first conducting pattern in series with each other, thereby forming a coil spirally wound around the amorphous magnetic metal layer together with the first conductors, and the step of forming a fourth insulating layer on the second conducting pattern.

REFERENCES:
patent: 3638153 (1972-11-01), Sparrow
patent: 4920806 (1990-05-01), Obama et al.
patent: 4931729 (1990-06-01), Pratt

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