Strain sensor

Details Strain sensor Strain sensor

2007-09-10

2010-06-01

Thompson, Jewel (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

Reexamination Certificate

active

07726198

ABSTRACT:
A strain sensor comprises a capacitor formed on a substrate, the capacitor having a layered structure in which a lower electrode, a metal oxide film of perovskite structure and an upper electrode are laminated consecutively on the substrate, the capacitor being adapted to be mounted upon a specimen, and a measuring circuit that measures a leakage current flowing through the capacitor between the upper electrode and the lower electrode.

REFERENCES:
patent: 6376090 (2002-04-01), Kijima
patent: 6974985 (2005-12-01), Kurasawa et al.
patent: 7245526 (2007-07-01), Oh et al.
patent: 7268575 (2007-09-01), Chen et al.
patent: 60253750 (1985-12-01), None
patent: 62200544 (1987-09-01), None

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