Strain sensing device

Details Strain sensing device Strain sensing device

1994-05-25

1996-05-28

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

338 5, G01P 1512

Patent

active

055200516

ABSTRACT:
Device including a strain generating portion supported at least at one end on a substrate and formed in a displaceable manner with respect to the substrate in a cavity of the substrate. A semiconductor strain sensing element, which is disposed at the strain generating portion, detects the amount of strain of the strain generating portion. A support is disposed at a connection point between the strain generating portion and the substrate so as to reinforce the connection point.

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patent: 5081867 (1992-01-01), Yamada
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Technical Digest of the 8th Sensor Symposium, May 10-11, 1989, Yamada et al., "Structure Analysis for an Accelerometer," pp. 45-48.
Proceedings of the Second International Forum on ASIC and Transducer Technology, Apr. 9-12, 1989, Mallon et al., "Silicon Sensors and Microstructures: Technology of Today," pp. 87-92.

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