Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1997-09-11
1999-12-21
Oen, William
Measuring and testing
Fluid pressure gauge
Diaphragm
G01L 904
Patent
active
060033800
ABSTRACT:
A pressure sensor prevents the occurrence of a large deformation or breakage of the diaphragm in a strain gage-type pressure sensor utilizing a thin plate-shaped insulating body as the diaphragm. The pressure sensor comprises an insulating diaphragm having a strain gage on its surface and a substrate positioned opposing the surface of the diaphragm on which the strain gage is mounted and kept a predetermined distance away from the surface. The diaphragm can be formed of material such as ceramic of alumina, zirconia or the like, silicon or crystal. The substrate can be formed of either the same material as the diaphragm, or the surface opposing the diaphragm can be formed of an insulator disposed on metal. The diaphragm and the substrate can be affixed using a low-melting glass.
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Koganei Yukio
Otani Koichi
Sasaki Keiji
Fujikoki Corporation
Oen William
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