Electrical resistors – Strain gauge type – Fluid- or gas pressure-actuated
Patent
1986-10-22
1988-03-29
Goldberg, E. A.
Electrical resistors
Strain gauge type
Fluid- or gas pressure-actuated
338 2, G01L 122
Patent
active
047346710
ABSTRACT:
A sensitive deflector beam having an integral deflectable element utilizes an immobilization pin and a limit pin to prevent damage to the deflectable element during fabrication and use. The immobilization pin is inserted through the beam and to the deflectable element to hold the element rigidly in place during fabrication. Thus, relatively rigorous operations such as polishing and circuit deposition may be accomplished without damage to the element.
REFERENCES:
patent: 3341796 (1967-09-01), Eisele
patent: 4322707 (1982-03-01), Ort
patent: 4331035 (1982-05-01), Eisele et al.
Eisele Walter H.
Tack Peter C.
Colwell Robert C.
Gaudier Dale
Goldberg E. A.
Heslin James M.
Lateef M. M.
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