Strain detector and pressure sensor

Details Strain detector and pressure sensor Strain detector and pressure sensor

2007-03-27

2007-03-27

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Dynamometers

Responsive to force

C073S718000, C073S723000, C073S760000, C073S862381, C073S862621, C073S862625, C073S862627, C029S621100

Reexamination Certificate

active

11066907

ABSTRACT:
A thin-film resistor (5) provided on a strain-generating part (2) via an insulating film (4) and an electrode thin-film (6) including an electrode pad (10) arranged in the thin-film resistor (5) are provided. The thin-film resistor (5) includes a strain-detecting thin-film resistive part (8) and an electrode connection (9) connected to the resistive part (8). The electrode connection (9) is formed to extend to the electrode pad (10). The electrode pad (10) includes an external-connection bonding area (12) and a testing probe area (13) formed at different positions. The electrode pad (10) is disposed on a tubular rigid body (1) provided at the outer peripheral edge of a strain-generating part (2).

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