Strain detector and method of manufacturing the same

Details Strain detector and method of manufacturing the same Strain detector and method of manufacturing the same

2007-09-04

2007-09-04

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

C073S715000, C073S723000, C073S725000, C073S726000, C073S761000, C073S774000, C073S862381, C073S862391, C073S862451, C073S862454, C073S862471, C073S862473, C073S862474, C073S862581

Reexamination Certificate

active

11182341

ABSTRACT:
A fluid pressure sensor (1) for measuring the pressure of a fluid comprises a diaphragm portion (12) which is a strain generating body, a silicon oxide film (21) as an insulating film, and a strain gauge (20) made of crystalline silicon, and austenitic precipitation hardening type Fe—Ni heat-resisting steel excellent in mechanical strength and corrosion resistance is used for the diaphragm portion (12). The silicon oxide film (21) is formed with the internal stress thereof adjusted to the range from −150 to 130 MPa. With this feature, the fluid pressure sensor (1) ensures high precision and reliability, and may be used even for measurement of a highly corrosive fluid.

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