Storehouse for use in storage of clean materials

Details Storehouse for use in storage of clean materials Storehouse for use in storage of clean materials

1996-06-07

1998-08-25

Larkin, Daniel S.

Measuring and testing

Liquid analysis or analysis of the suspension of solids in a...

Surface tension

73 6452, 553852, 454187, G01N 1300, G01R 2700, G01B 1100, F24F 700

Patent

active

057984557

ABSTRACT:
A storehouse is constituted including a clean room 12 and a storage space 10 for storing clean materials, which is isolated from the clean room. The clean air for storage is generated by a storage air generator 36 and is supplied to the storage space 10 through air supply systems 32, 46. The clean air for storage is purified to such a cleanliness level that it contains hydrocarbon group including methane of less than 10 ppb by using the method of combustion with a catalyst, or purified to such a cleanliness level extent that the contact angle of a pure water droplet or the surface resistivity to the clean material surface can be kept at substantially the same level as that which is indicated immediately after cleaning the material, by using a catalytic reaction tower, an activated charcoal filter, or a fluid bed type adsorbing tower, all of which are made by using materials generating no gaseous impurities. Accordingly, it is possible to effectively prevent the substrate surface from contamination caused by the organic substance. No inert gas is employed, thus ensuring safety operation with an inexpensive running cost.

REFERENCES:
patent: 4923352 (1990-05-01), Tamura et al.
patent: 5096477 (1992-03-01), Shinoda et al.
patent: 5363867 (1994-11-01), Kawano et al.
Ryley, A New Method of Determining the Contact Angle Made by a Sessile Drop upon a Horizontal Surface (Sessile Drop Contact Angle), Journal of Colloid and Interface Science, vol. 59, No. 2, Apr. 1977, pp. 243-251.

Affiliated with

Also associated with

Rating

Storehouse for use in storage of clean materials does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Storehouse for use in storage of clean materials, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Storehouse for use in storage of clean materials will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-37160