Supports: cabinet structure – With movable components – Continuously housed
Patent
1990-12-26
1993-07-13
Brittain, James R.
Supports: cabinet structure
With movable components
Continuously housed
2482065, 384446, A47B 9500
Patent
active
052267130
ABSTRACT:
A storage vessel maintaining clean environment for storing articles such as semiconductor wafers includes a plurality of receiver fixed to a shaft for horizontal rotation. The receivers support carriers having the articles therein. Both thrust and radial bearings supporting the shaft are of a non-contacting magnetic type. The shaft is driven by a motor with a rotor fixed to the shaft and a stator facing the rotor. The vessel may have a vacuum or be charged with inert gas.
REFERENCES:
patent: 2044518 (1936-06-01), Thorstensen
patent: 2346914 (1944-04-01), Drucker
patent: 3000379 (1961-09-01), Viers
patent: 3650039 (1972-03-01), Harding
patent: 3811740 (1974-05-01), Sacerdoti et al.
patent: 4250666 (1981-02-01), Rakestraw
Technische Rundschau, vol. 80, No. 22, May 27, 1988, pp. 64-66; Traxler & Salm; `Aktive magnetische Rotorlagerung`.
Anderson Gerald A.
Brittain James R.
Ebara Corporation
LandOfFree
Storage vessel does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Storage vessel, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Storage vessel will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2306956