Storage container for precision substrates

Details Storage container for precision substrates Storage container for precision substrates

1999-07-02

2000-08-08

Sewell, Paul T.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

206232, 206454, B65D 8548

Patent

active

060988096

ABSTRACT:
A storage container for precision substrates comprising: an opening front face of a pod case for aligning and accommodating a plurality of wafers is covered with a pod door, a bottom plate attached to a bottom face of the pod case, and a pocket body integrally formed at the other end of the bottom plate and adjacent to the back face of the pod case in a standing condition. An identification plate for wafers is detachably inserted into the pocket. Since there is no need of peeling off an identification code seal from the storage container for precision substrates, contamination of the wafer can be prevented.

REFERENCES:
patent: 5669508 (1997-09-01), Chen et al.
patent: 5678693 (1997-10-01), Tapp et al.
patent: 5755332 (1998-05-01), Holliday et al.
patent: 5915562 (1999-06-01), Nyseth et al.

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