Storage capacitor with a conducting oxide electrode for metal-ox

Details Storage capacitor with a conducting oxide electrode for metal-ox Storage capacitor with a conducting oxide electrode for metal-ox

1993-08-09

1995-01-17

Reynolds, Bruce A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361311, 361322, 427 79, 4271263, 257306, 257310, H01G 101

Patent

active

053830881

ABSTRACT:
A capacitor having a high dielectric constant and method of making the same is disclosed. The capacitor comprises a bottom electrode comprising a conductive oxide deposited upon a substrate by chemical vapor deposition. A dielectric layer having a high dielectric constant is deposited upon the conductive oxide. Lastly, a counter electrode is formed upon the dielectric layer.

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