Storage box for semiconductor wafers

Special receptacle or package – Holder for a removable electrical component – For a semiconductor wafer

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Details

206591, 206524, 206832, B65D 8590

Patent

active

059883936

ABSTRACT:
A storage box is provided for the safe-keeping of fabricated or semi-fabricated semiconductor wafers. This wafer storage box allows the wafers to be tightly secured in position when held in the storage box for storage or shipping without the possibility of breaking the wafers as in the prior art. The wafer storage box includes a receptacle member having a first piece of soft material such as anti-static sponge on the inside thereof, a holding member which is accommodated in the receptacle member, and a covering member having a second piece of soft material such as anti-static sponge on the inside thereof. When the covering member is mounted on the receptacle member, the first and second pieces of anti-static sponge are disposed on opposite sides of the holding member, thus pressing against the wafers to secure them in position in the storage box. The use of the anti-static sponge for securing purposes prevents the wafers from breaking into pieces, as otherwise occasionally occurs when using clasping pieces as seen in the prior art.

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patent: 5759006 (1998-06-01), Miyamoto et al.
patent: 5803269 (1998-09-01), Jacoby et al.

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