Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1987-09-03
1989-08-01
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Diaphragm
296211, 73721, 73724, 73727, 338 4, 361283, G01L 708, G01L 906, G01L 912
Patent
active
048524085
ABSTRACT:
A semiconductor transducer with a diaphragm is constructed utilizing a substrate wherein a first portion of that first face is etched to a planar level to achieve a second portion as a physical stop on this substrate, the physical stop having a planar stop face, a sloping sided cavity is etched into a semiconductor wafer from a first face thereof to form a deformable diaphragm in this semiconductor wafer. The semiconductor wafer is anodically bonded to the substrate planar level, with the physical stop located in the cavity and with the stop face acting to prohibit excess movement of the diaphragm. The foregoing abstract is merely a resume of one general application, is not a complete discussion of all principles of operation or applications, and is not to be construed as a limitation on the scope of the claimed subject matter.
REFERENCES:
patent: 3397278 (1968-08-01), Pomerantz
patent: 4080830 (1978-03-01), Eckstein et al.
patent: 4199991 (1980-04-01), Kodama
patent: 4295115 (1981-10-01), Takahashi et al.
patent: 4333350 (1982-06-01), Gibb
patent: 4454771 (1984-06-01), Shimazoe et al.
patent: 4519255 (1985-05-01), Ishii
patent: 4520675 (1985-06-01), Ziegler
patent: 4649363 (1987-03-01), Starr
patent: 4691575 (1987-09-01), Sonderegger et al.
Scott & Fetzer Company
Woodiel Donald O.
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